The device testing platform is composed of semi-automatic probe station, temperature controller, precision semiconductor parameter analyzer, network analyzer and 1/f noise testing system. The platform can meet the need of test of MOS, BJT, Diode, Inductor, Resistor and other device. It provides the temperature range of -55℃ to 200℃, which can cover the DC, CV and RF model test requirements. The platform also supports the wafer level reliability test, such as HCI, NBTI, TDDB, EM etc. The platform is equipped with a 12 inch semi-automatic probe station, which meets the testing requirements from single Die to 6/8/12 inch wafer.